Osa dynamic phase measuring profilometry for rigid. Twocamera phase measuring profilometry system scientific. The application of the calibration gauge avoids the translation of the standard plane during the calibration process. Pdf multicamera phase measuring profilometry for accurate. Canlin zhou 1,shuchunsi1,xiaoleili3, zhenkun lei2, yanjie li3, chaorui. Phase measurement profilometry pmp has been widely used in automatic processing cadcam, computer vision, and reverse engineering 109 because of its. Improving the accuracy performance of phase shifting profilometry for the measurement of objects in motion abstract this letter presents a new approach to reducing the errors associated with the shape measurement of a rigid object in motion by means of phase shifting profilometry. The standard for profilometry x y scan area height range desktop dimensions scan speed 200 x 150mm motorized 2.
The phaseacquisition algorithms are sufficiently simple that highresolution phase maps. Highresolution 3d profilometry with binary phaseshifting. In phasemeasuring profilometry, a sequence of phaseshifted sinewave patterns is projected onto a. The experimental setups used to assess these different techniques are similar, and they require essentially the same equipment. A flexible phase error compensation method based on. This paper presents a dynamic phase measurement profilometry pmp method based on the simulated annealing algorithm. Introduction with the rapid development of industrialization, the high measurement. In this paper, two algorithms developed for phase acquisition of such images are presented and compared.
Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image. Online phase measuring profilometry based on phase matching. Phasemeasuring profilometry using sinusoidal grating springerlink. Measuring the 3d shape of high temperature objects using.
Stair phasecoding fringe plus phaseshifting used in 3d. Optical threedimensional sensing by phase measuring. In the case of phase measuring profilometry pmp, the projected patterns are composed of a rolling sinusoidal wave, but as a set of. Fpgabased phase measuring profilometry system request pdf. Optical, noncontact, automated experimental techniqes for threedimensional reconstruction of object surfaces using projection moire, stereo imaging, and phasemeasuring profilometry.
Online phase measuring profilometry based on phase matching is proposed. Unfortunately, only an ambiguous estimation instead of an accurate measurement could be achieved. Phase measuring profilometry pmp is an important technique used in 3d data acquisition. Osa automated phasemeasuring profilometry of 3d diffuse. A shearing polarization interferometer is used for projection. Highspeed fpgabased phase measuring profilometry architecture. Multicamera phase measuring profilometry for accurate. The proven multisensor technology of frt enables the combination of different technologies and measuring ranges in one optical. Stair phasecoding fringe plus phaseshifting used in 3d measuring profilometry zhuohuan zeng, biao li, yanjun fu and minggang chai abstract as the number of codewords adopted in phasecoding fringes.
However, pixel matching by the global traversing algorithm takes up most of the time in the whole reconstruction process. The whole pmp algorithm is designed and implemented based on the principle of fullpipeline and parallelism. Many techniques can extract the phase distribution of distorted fringes. The main objective was to test the limitations of three experimental techniques. Osa highspeed fpgabased phase measuring profilometry. Critical dimensions as step, curvature, flatness are computed from the surface topography.
Saturation model and phase recovering for phase measuring profilometry p. Phasemeasuring profilometry using sinusoidal grating. But the process of phase unwrapping may affect the quality of absolute phase. Phase measuring profilometry is a method of structured light illumination whose threedimensional reconstructions are susceptible to error from nonunitary gamma in. The fringe projection profilometry with sinusoidal patterns based on phaseshifting algorithms is commonly distorted by the nonlinear intensity response of commercial projector. Rgb tricolor based fast phase measuring profilometry. Structured light illumination is an active 3d scanning technique based on projectingcapturing a set of striped patterns and measuring the warping of the patterns as they reflect off a target objects. Deformed grating images are detected by an array camera and processed by a microcomputer. A new fast profilometer for fullfield 3d shape measurement is implemented. Shape measurement by phase stepping method using multiline leds yoshiharu morimoto 1, akihiro masaya 1, motoharu fujigaki 2 and daisuke asai 3 1moire institute inc. Thus, increasing the codeword approach in a phase coding fringe remains a challenge. New phase measuring deflectometry device for midtohigh. The direct mapping formula can be generated by measuring the phases of. Structured light phase measuring profilometry pattern design for.
A novel phase measurement profilometry based on linear ccd. In the case of phase measuring profilometry pmp, the projected patterns are composed of a rolling sinusoidal wave, but as a set of timemultiplexed patterns, pmp requires the target surface to. In view of the limitation of wangs method,we proposed a dynamic threedimensional3d measurement based on the phase. Shape measurement by phasestepping method using multiline leds yoshiharu morimoto 1, akihiro masaya 1, motoharu fujigaki 2 and daisuke asai 3 1moire institute inc. A calibration gauge containing four virtual calibration planes is. The main objective was to test the limitations of three experimental. Investigation of phase pattern modulation for digital. We introduce you to a structured light illumination sli method known as phase measuring profilometry pmp. The probability distribution functions pdf of the wrapped phase will become abnormal when there are nonlinear effects in a phase measuring profilometry. A calibration gauge containing four virtual calibration planes is designed. Improving the accuracy performance of phase shifting profilometry for the measurement of objects in motion lei lu,1 jiangtao xi,1, yanguang yu,1 and qinghua guo1 1school of electrical computer and. A direct phase toheight mapping algorithm for phase measuring profilometry is presented and verified by experiments. Pdf automated phasemeasuring profilometry of 3d diffuse. Universal phase unwrapping for phase measuring profilometry.
Multiple phase shift patterns are projected onto the 3d target and. Multicamera phase measuring profilometry for accurate depth measurement. Yongchang wang, kai liu, qi hao, daniel lau, and laurence g. Phasemeasuring profilometry is the most promising of the three techniques for mapping rock fracture surfaces. Three optical, noncontact, automated experimental techniques for determining the topography of object surfaces were assessed. When a sinusoidal grating is projected on either a reference plane or a diffuse object to be measured, every point along a line normal to the grating lines, on the reference plane as well as the object, can be.
We introduce you to a structured light illumination sli method known as. Introduction with the rapid development of industrialization, the high measurement accuracy of phasemeasuring profilometry pmp makes it useful for various applications. Absolute phase retrieval methods for digital fringe projection. While the historical notion of a profilometer was a device similar to a phonograph that measures a surface as the surface is moved relative. Optimized twofrequency phasemeasuring profilometry light. Stair phase coding fringe plus phase shifting used in 3d measuring profilometry zhuohuan zeng, biao li, yanjun fu and minggang chai abstract as the number of codewords adopted in phase coding fringes increases, the solution of fringe orders leads to many mistakes. Introduction threedimensional shape measurement is used in various fields such as robotics and inspection of industry production.
Spie 6555, sensors and systems for space applications. When a sinusoidal amplitude grating is projected on an object, the surfaceheight distribution of the object is translated to a phase distribution of the deformed. In this paper, a modified stair phase coding fringe is designed, and a new phase unwrapping algorithm based on shifting fringe order is. Abnormal phase removing method in phase measuring profilometry. Shape measurement by phasestepping method using multi. Digital fringe projection dfp based 3d optical shape measurement. In view of the limitation of wangs method,we proposed a dynamic threedimensional3d measurement based on the phaseshifting moire algorithm. Assuming an accurate calibration has been performed, the difference in phase between the two signals known as phase shift is a result of the. By adding an additional special phaseshifting sinusoidal grating to. Structured light phase measuring profilometry pattern design for binary spatial light modulators. Phasemeasuring profilometry is the most promising of the three techniques for mapping rock fracture surfaces automatically, accurately, quickly, and with high.
The high resolution surface profile of a 3d diffuse object is obtained by measurement of the phase distribution across the image of a projected sinusoidal grating deformed by the surface. In the case of phase measuring profilometry pmp, the projected patterns are composed of a rolling sinusoidal wave, but as a. These surface roughness testers profilometer are distinguished by a high level of accuracy, multiple parameters and simplicity of operation. Gamma model and its analysis for phase measuring profilometry article pdf available in journal of the optical society of america a 273. Pdf structured light phase measuring profilometry pattern. This paper proposes a highspeed fpga architecture for the phase measuring profilometry pmp algorithm. While just one fixed sinusoidal fringe is projected on a measured object moving with the pipeline, deformed. Optical sensors fast, flexible, accurate and contact free. Structured light illumination is an active 3d scanning technique based on projectingcapturing a set of striped patterns and measuring the warping of the patterns as they reflect off a target objects surface. Shape measurement by phasestepping method using multiline leds. Singleshot absolute 3d shape measurement with fourier. Automated phasemeasuring profilometry of 3d diffuse objects. The profilometry of three dimensional objectives based on phase approaching of projected grating is widely used in various fields of application engineering. This versatility allows many of our clients to use the system for a variety of related inspection tasks.
Although the phase measuring method can reach more high precision, its real measurement speed is very low and cant be applied on. As the number of codewords adopted in phase coding fringes increases, the solution of fringe orders leads to many mistakes. While just one fixed sinusoidal fringe is projected on a measured object moving with the pipeline, deformed patterns modulated by the object moving at the same distance moment are captured synchronously by the ccd camera. Optical, noncontact, automated experimental techniques for. A calibration gauge containing four virtual calibration planes. A new method for both the phaseheight mapping and the 3d coordinate calibration in phasemeasuring profilometry pmp is presented. Saturation model and phase recovering for phase measuring. Robust measurement of the diffuse surface by phase shift. Optical profilometry uses light instead of a physical probe. After contrast is corrected, the 3d profile of the object will be completed by phase shift profilometry. Profilometry for surface characterization and dimensioning is a key area of expertise for covalent. Profilometry tools and test plates can be used, but they only provide line scans or qualitative information, so a quantitative full surface measurement can be time consuming depending on the desired spatial resolution. Highspeed 3d shape measurement using fourier transform. Us7304745b2 phase measuring method and apparatus for multi.
Structured light phase measuring profilometry pattern. Phase measuring sensors are often used for singe point or whole field profilometry, for example profiling of threedimensional objects. The direct mapping formula can be generated by measuring the phases of several different parallel planes rather than geometric parameters of the optical system. Besides absolute phase retrieval is timecosting especially for highspeed 3d shape measurement. These surface roughness testers profilometer are distinguished by a high. Dynamic 3d shape measurement based on the phaseshifting. Advanced photonics journal of applied remote sensing. Overview of phase measuring profilometry structured light illumination by lgh 1172014 updated 11102014. The theory of using an intensitycorrecting algorithm to.
Deflectometry is able to satisfy this demand because it can. An overview covalent metrologys mission is to help customers solve measurement, materials and process problems quickly and efficiently. Among all sli methods, the phase measuring profilometry pmp is recognized as one of the most robust and precise strategy 5. In dynamic pmp for rigid objects, pixel matching is an effective method to make onetoone pixel correspondence in each captured pattern. Pdf gamma model and its analysis for phase measuring. The phase acquisition algorithms are sufficiently simple that highresolution phase maps using a highresolution area detector array can be generated in a short time. Absolute depth measurement using multiphase normalized cross. In this paper, two cameras are equipped in our system to obtain fast and static measurement compared to the conventional measuring system with single camera which needs rotated measurement. A direct mapping algorithm for phasemeasuring profilometry.
Absolute phase retrieval methods for digital fringe projection profilometry. This paper proposes a fast measurement method based on fourier transform profilometry and stereo vision. A direct phasetoheight mapping algorithm for phasemeasuring profilometry is presented and verified by experiments. Phase measurements compare the phase of the signal going into a device the incident signal to the phase of the devices response signal.
In this method we analyze each pixel of the captured pattern sequence as a temporal signal. Improving the accuracy performance of phaseshifting. Phase measuring profilometry is the most promising of the three techniques for mapping rock fracture surfaces automatically, accurately, quickly, and with high resolution. For the phasetoheight conversion, an equiphase coordinate. Pdf phaseheight mapping and coordinate calibration.
Optical, noncontact, automated experimental techniqes for. High speed 3d shape measurement with temporal fourier. After contrast is corrected, the 3d profile of the object will be completed by phaseshift profilometry. A random phase shift atgorithm based on the principle of phase measuring profilometry with a projected sinusoidal grating to 360 measurement of the surface topography of 3d diffuse objects is. Dynamic 3d shape measurement based on the phaseshifting moire algorithm. The whole pmp algorithm is designed and implemented based on the principle of full. The results show that the accuracy of the fpga system is comparable with those of current topperforming software implementations. Osa dynamic phase measuring profilometry for rigid objects. Psp is widely used in industrial applications and many other fields because of its accuracy and efficiency. Stepped frequency radar target recognition using locality preserving projections p.
Compared to other optical methods for 3d shape measurement, this technique is not only faster but also more accurate. The key component to this technique is directing the light in a way that it can detect the surface in 3d. A profilometer is a measuring instrument used to measure a surfaces profile, in order to quantify its roughness. Online phase measuring profilometry based on phase. Hassebrook multicamera phase measuring profilometry for accurate depth measurement, proc.
The lock process establishes the mapping between the phase map computed by phase shift profilometry and the phase map computed by the light stripe method. A new method for both the phase height mapping and the 3d coordinate calibration in phase measuring profilometry pmp is presented. A new fast 3d profilometry is presented in this paper. Fourier transform profilometry ftp 4,5,6,7,8 and phase measurement profilometry pmp 9,10,11,12 are the prominent representative methods among them. While the work previously reported is only valid for. Calibration of a fringe projection 3d measurement system. Extremely sensitive and highly accurate readings from this phase ii. Automated phase measuring profilometry of 3d diffuse objects. The technique is based on the principle of phase measurement of a projected grating image on the object surface which conforms to the shape of the object. The hold process tracks the phase map with a one shot of light stripe pattern. Optical threedimensional sensing by phase measuring profilometry. Calibration is to transform the 2d phase information to the world coordinates in a fringe projection 3d measurement system. Pdf a novel encodedphase technique for phase measuring. The response signal can be either reflected or transmitted.